The Opti RF power rack
RF power rack for HDP-CVD tools reduces operational costs and increases uptime
Advanced Energy Industries, Inc., a global specialist in highly engineered, precision power conversion, measurement and control solutions, has launched the Opti RF power rack for legacy high-density plasma chemical vapor deposition (HDP-CVD) tools. Delivering over 70 per cent system-level efficiency at full power, Opti is designed to reduce energy costs and improves uptime, compared to legacy systems.
“Fabs and OEMs looking to improve performance and yield of mature node 200 mm HDP-CVD equipment are under pressure to replace aging power racks with more efficient systems that can be maintained more easily,” said Brian Kowal, Advanced Energy’s vice president, Global Services. “Advanced Energy’s Opti RF power rack will extend the life of legacy tools and reduce the energy consumption and carbon footprint of the fab.”
The rack integrates Paramount 13.56 MHz and dual 2 MHz Paramount Plus generators, with front-and-back access for easier maintenance. Its built-in dashboard, powered by PowerInsight by Advanced Energy software, offers real-time diagnostics, remote access, and predictive alerts—cutting troubleshooting time by up to 90per cent.
Within the rack, generators feature a real-time dashboard integrated with PowerInsight. PowerInsight continuously timestamps and records generator operational data, including oscilloscope-equivalent FastDAQ event captures, for enhanced performance visibility. Integrated features include a built-in flight recorder, generator health monitoring, and alert capabilities.
Advanced Energy offers global services that include on-site installation and support, as well as local assistance for companies upgrading 200 mm fabs worldwide.
For further information on the Opti RF power rack, click here, and read more information about Advanced Energy’s global services here.
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